HeuiJae Pahk

HeuiJae Pahk

Seoul National University

Professor

Department of Mechanical Engineering

Research Area

  • #Optics
  • #Materials science
  • #Interferometry
  • #White light interferometry
  • #Thin film
  • #Critical dimension
  • #Pixel
  • #White light scanner
  • #Vibration
  • #Reflectometry

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Related papers to
‘ Optics ‘ : 15

  • Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

    2014/06

    1.2 Impact Factor

    15 citations

    Taeyong Jo, KwangRak Kim, SeongRyong Kim, HeuiJae Pahk

    DOI : 10.3807/JOSK.2014.18.3.236

    • #Materials science
    • #Optics
    • #Thin film
    • #Interferometry
    • #Opacity
    • #Reflection coefficient
    • #Reflectometry
    • #Fresnel equations
    • #White light interferometry
    • #White light scanner

All papers authored by
‘ HeuiJae Pahk ’ : 18

  • Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

    2014/06
    JOURNAL OF THE OPTICAL SOCIETY OF KOREA

    1.2 Impact Factor

    15 citations

    Taeyong Jo, KwangRak Kim, SeongRyong Kim, HeuiJae Pahk

    DOI : 10.3807/JOSK.2014.18.3.236

    • #Materials science
    • #Optics
    • #Thin film
    • #Interferometry
    • #Opacity
    • #Reflection coefficient
    • #Reflectometry
    • #Fresnel equations
    • #White light interferometry
    • #White light scanner

Related papers to
‘ Optics ‘ : 15

  • Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

    2014/06
    JOURNAL OF THE OPTICAL SOCIETY OF KOREA

    1.2 Impact Factor

    15 citations

    Taeyong Jo, KwangRak Kim, SeongRyong Kim, HeuiJae Pahk

    DOI : 10.3807/JOSK.2014.18.3.236

    • #Materials science
    • #Optics
    • #Thin film
    • #Interferometry
    • #Opacity
    • #Reflection coefficient
    • #Reflectometry
    • #Fresnel equations
    • #White light interferometry
    • #White light scanner
  • Volumetric thin film thickness measurement using spectroscopic imaging reflectometer and compensation of reflectance modeling error

    2014/09
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING

    1.2 Impact Factor

    14 citations

    KwangRak Kim, SeongRyong Kim, Soonyang Kwon, Heui Jae Pahk

    DOI : 10.1007/S12541-014-0534-3

    • #Materials science
    • #Optics
    • #Thin film
    • #Pixel
    • #Filter (signal processing)
    • #Gaussian
    • #Microscopy
    • #Band-pass filter
    • #Silicon oxide
    • #Ellipsometry

Get access to
Contact information

Log in

All papers authored by
‘ HeuiJae Pahk ’ : 18

  • Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

    2014/06
    JOURNAL OF THE OPTICAL SOCIETY OF KOREA

    1.2 Impact Factor

    15 citations

    Taeyong Jo, KwangRak Kim, SeongRyong Kim, HeuiJae Pahk

    DOI : 10.3807/JOSK.2014.18.3.236

    • #Materials science
    • #Optics
    • #Thin film
    • #Interferometry
    • #Opacity
    • #Reflection coefficient
    • #Reflectometry
    • #Fresnel equations
    • #White light interferometry
    • #White light scanner
  • Volumetric thin film thickness measurement using spectroscopic imaging reflectometer and compensation of reflectance modeling error

    2014/09
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING

    1.2 Impact Factor

    14 citations

    KwangRak Kim, SeongRyong Kim, Soonyang Kwon, Heui Jae Pahk

    DOI : 10.1007/S12541-014-0534-3

    • #Materials science
    • #Optics
    • #Thin film
    • #Pixel
    • #Filter (signal processing)
    • #Gaussian
    • #Microscopy
    • #Band-pass filter
    • #Silicon oxide
    • #Ellipsometry

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